Invention Grant
- Patent Title: Die singulation methods
- Patent Title (中): 模切法
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Application No.: US11759824Application Date: 2007-06-07
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Publication No.: US07825010B2Publication Date: 2010-11-02
- Inventor: Paul Clawson
- Applicant: Paul Clawson
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Some embodiments include methods in which a front side region of a semiconductor substrate is placed against a surface. While the front side region is against the surface, the semiconductor substrate is thinned, and then cut into a plurality of dice. The surface may be a pliable material, and may be stretched after the cutting to increase separation between at least some of the dice. While the pliable surface is stretched, at least some of the dice may be picked from the surface. In some embodiments, the semiconductor substrate is retained to the surface with a radiation-curable material. The material is in an uncured and tacky form during the thinning of the substrate, and is subsequently cured into a less tacky form prior to the picking of dice from the surface.
Public/Granted literature
- US20080305616A1 Die Singulation Methods Public/Granted day:2008-12-11
Information query
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