Invention Grant
US07825032B2 Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires
失效
制造一组半导体纳米线,以及包括一组纳米线的电子器件
- Patent Title: Fabricating a set of semiconducting nanowires, and electric device comprising a set of nanowires
- Patent Title (中): 制造一组半导体纳米线,以及包括一组纳米线的电子器件
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Application No.: US10584037Application Date: 2004-12-03
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Publication No.: US07825032B2Publication Date: 2010-11-02
- Inventor: Erik Petrus Antonius Maria Bakkers , Louis Felix Feiner , Abraham Rudolf Balkenende
- Applicant: Erik Petrus Antonius Maria Bakkers , Louis Felix Feiner , Abraham Rudolf Balkenende
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips Electronics N.V.
- Current Assignee: Koninklijke Philips Electronics N.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP03104900 20031222
- International Application: PCT/IB2004/052651 WO 20041203
- International Announcement: WO2005/064639 WO 20050714
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
The method of fabricating semiconducting nanowires having a desired wire diameter includes providing pre-fabricated semiconducting nanowires, at least one pre-fabricated nanowire having a wire diameter larger than the desired wire diameter (d); and reducing the wire diameter of the at least one pre-fabricated nanowire by etching. The etching is induced by light which is absorbed by the at least one pre-fabricated nanowire. The spectrum of the light is chosen such that the absorption of the at least one pre-fabricated nanowire is significantly reduced when the at least one pre-fabricated nanowire reaches the desired wire diameter.
Public/Granted literature
- US20080224115A1 Fabricating a Set of Semiconducting Nanowires, and Electric Device Comprising a Set of Nanowires Public/Granted day:2008-09-18
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