Invention Grant
- Patent Title: Non-aqueous microelectronic cleaning compositions containing fructose
- Patent Title (中): 含有果糖的非水性微电子清洗组合物
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Application No.: US11630602Application Date: 2005-02-01
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Publication No.: US07825078B2Publication Date: 2010-11-02
- Inventor: Seiji Inaoka
- Applicant: Seiji Inaoka
- Applicant Address: US NJ Phillipsburg
- Assignee: Mallinckrodt Baker, Inc.
- Current Assignee: Mallinckrodt Baker, Inc.
- Current Assignee Address: US NJ Phillipsburg
- Agency: Ohlandt, Greeley, Ruggiero & Perle, LLP
- Agent George W. Rauchfuss, Jr.
- International Application: PCT/US2005/003422 WO 20050201
- International Announcement: WO2006/019402 WO 20060223
- Main IPC: C11D7/26
- IPC: C11D7/26 ; C11D7/32 ; C11D7/34 ; C11D7/50
Abstract:
Back end photoresist strippers and residue compositions are provided by non-aqueous compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise a polar organic solvent, a hydroxylated amine, and as a corrosion inhibitor fructose.
Public/Granted literature
- US20080287333A1 Non-Aqueous Microelectronic Cleaning Compositions Containing Fructose Public/Granted day:2008-11-20
Information query
