Invention Grant
- Patent Title: Thermal-type infrared image sensing device and method of producing the same
- Patent Title (中): 热式红外图像感测装置及其制造方法
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Application No.: US12258764Application Date: 2008-10-27
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Publication No.: US07825379B2Publication Date: 2010-11-02
- Inventor: Yoshiyuki Nakaki
- Applicant: Yoshiyuki Nakaki
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-291875 20071109; JP2008-236397 20080916
- Main IPC: H01L25/00
- IPC: H01L25/00

Abstract:
A thermal-type infrared image sensing device and method of producing a thermal-type infrared image sensing device are provided. The thermal-type infrared image sensing device includes pixel elements that are two-dimensionally arranged on a semiconductor substrate. Each pixel element includes a detector that detects temperature, an infrared-light absorber that absorbs incident infrared light and that converts the light into heat, and a support that supports the detector apart from the semiconductor substrate. The thermal-type infrared image sensing device also includes reference-pixel elements that are arranged adjacent to and along a row of the pixel elements. Each of the reference pixels generates a reference signal, and each of the reference pixels includes a structure that shields a detector from incident infrared light. The detectors of the pixel elements and the reference-pixel elements are each connected to the semiconductor substrate through the respective supports.
Public/Granted literature
- US20090146059A1 THERMAL-TYPE INFRARED IMAGE SENSING DEVICE AND METHOD OF PRODUCING THE SAME Public/Granted day:2009-06-11
Information query
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