Invention Grant
- Patent Title: Plasma-based EUV light source
- Patent Title (中): 基于等离子体的EUV光源
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Application No.: US12101083Application Date: 2008-04-10
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Publication No.: US07825391B2Publication Date: 2010-11-02
- Inventor: Uri Shumlak , Raymond Golingo , Brian A. Nelson
- Applicant: Uri Shumlak , Raymond Golingo , Brian A. Nelson
- Applicant Address: US WA Seattle
- Assignee: The University of Washington
- Current Assignee: The University of Washington
- Current Assignee Address: US WA Seattle
- Agency: Woodcock Washburn LLP
- Main IPC: A61N5/06
- IPC: A61N5/06

Abstract:
Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.
Public/Granted literature
- US20080272317A1 PLASMA-BASED EUV LIGHT SOURCE Public/Granted day:2008-11-06
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