Invention Grant
- Patent Title: Memory cell having improved mechanical stability
- Patent Title (中): 具有改善的机械稳定性的记忆单元
-
Application No.: US12098556Application Date: 2008-04-07
-
Publication No.: US07825398B2Publication Date: 2010-11-02
- Inventor: Thomas D. Happ , Yi-Chou Chen , Jan Boris Philipp , Hsiang-Lan Lung
- Applicant: Thomas D. Happ , Yi-Chou Chen , Jan Boris Philipp , Hsiang-Lan Lung
- Applicant Address: TW Hsinchu DE Munich
- Assignee: Macronix International Co., Ltd.,Qimonda A.G.
- Current Assignee: Macronix International Co., Ltd.,Qimonda A.G.
- Current Assignee Address: TW Hsinchu DE Munich
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
Memory cells are described along with methods for manufacturing. A memory cell described herein includes a bottom electrode comprising a base portion and a pillar portion on the base portion, the pillar portion and the base portion having respective outer surfaces and the pillar portion having a width less than that of the base portion. A memory element is on a top surface of the pillar portion of the bottom electrode, and a top electrode is on the memory element. A dielectric spacer contacts the outer surface of the pillar portion, the outer surface of the base portion of the bottom electrode self-aligned with an outer surface of the dielectric spacer.
Public/Granted literature
- US20090251944A1 MEMORY CELL HAVING IMPROVED MECHANICAL STABILITY Public/Granted day:2009-10-08
Information query
IPC分类: