Invention Grant
- Patent Title: Integrated circuit comprising an organic semiconductor, and method for the production of an integrated circuit
- Patent Title (中): 包括有机半导体的集成电路以及用于制造集成电路的方法
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Application No.: US12188966Application Date: 2008-08-08
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Publication No.: US07825404B2Publication Date: 2010-11-02
- Inventor: Marcus Halik , Hagen Klauk , Guenter Schmid , Andreas Walter , Ute Zschieschang
- Applicant: Marcus Halik , Hagen Klauk , Guenter Schmid , Andreas Walter , Ute Zschieschang
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Priority: DE10340608 20030829
- Main IPC: H01L51/30
- IPC: H01L51/30 ; G03F1/04 ; C08G65/38

Abstract:
An embodiment of the invention provides an integrated circuit having an organic field effect transistor (OFET) with a dielectric layer. The dielectric layer is prepared from a polymer formulation comprising: about 100 parts of at least one crosslinkable base polymer, from about 10 to about 20 parts of at least one di- or tribenzyl alcohol compound as an electrophilic crosslinking component, from about 0.2 to about 10 parts of at least one photo acid generator, and at least one solvent. Another embodiment provides a semiconductor fabrication method. The method comprises applying the polymer formulation to a surface of a substrate, drying the polymer formulation, crosslinking the polymer formulation after drying, and baking the polymer formulation after crosslinking.
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