Invention Grant
- Patent Title: Thin film transistor with improved junction region
- Patent Title (中): 具有改善结区的薄膜晶体管
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Application No.: US11017667Application Date: 2004-12-22
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Publication No.: US07825411B2Publication Date: 2010-11-02
- Inventor: Jin-Wook Seo , Ki-Yong Lee , Tae-Hoon Yang , Byoung-Keon Park
- Applicant: Jin-Wook Seo , Ki-Yong Lee , Tae-Hoon Yang , Byoung-Keon Park
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2004-0047308 20040623
- Main IPC: H01L31/00
- IPC: H01L31/00

Abstract:
A thin film transistor and method of fabricating the same are provided. In the thin film transistor, a seed or a grain boundary exists in a semiconductor layer pattern but not in a junction region. The method includes forming a semiconductor layer pattern. Forming the semiconductor layer pattern includes: forming and patterning a first capping layer on an amorphous silicon layer; forming a second capping layer on the first capping layer pattern; forming a metal catalyst layer on the second capping layer; diffusing the metal catalyst; and crystallizing the amorphous silicon layer to form a polysilicon layer. Therefore, it is possible to prevent that a trap is generated in the junction region, thereby obtaining improved and uniform characteristics of the device.
Public/Granted literature
- US20050285110A1 Thin film transistor and method of fabricating the same Public/Granted day:2005-12-29
Information query
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