Invention Grant
- Patent Title: Suspended-membrane/suspended-substrate monolithic microwave integrated circuit modules
- Patent Title (中): 悬浮膜/悬浮基板单片微波集成电路模块
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Application No.: US11324066Application Date: 2005-12-29
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Publication No.: US07825440B1Publication Date: 2010-11-02
- Inventor: Debabani Choudhury
- Applicant: Debabani Choudhury
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Ladas & Parry
- Main IPC: H01L29/80
- IPC: H01L29/80 ; H01L29/40 ; H01L23/34
Abstract:
A suspended-membrane/suspended-substrate monolithic microwave integrated circuit module and method of making same. The device contains a plurality of active devices, such as transistors, a plurality of transmission mediums connected to the active devices; and a substrate having a first portion supporting the active devices and the transmission mediums thereon, and further having a plurality of discrete second portions extending from the first portion. The method teaches how to manufacture the device.
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