发明授权
- 专利标题： Suspended-membrane/suspended-substrate monolithic microwave integrated circuit modules
- 专利标题（中）： 悬浮膜/悬浮基板单片微波集成电路模块
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申请号： US11324066申请日： 2005-12-29
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公开(公告)号： US07825440B1公开(公告)日： 2010-11-02
- 发明人: Debabani Choudhury
- 申请人： Debabani Choudhury
- 申请人地址： US CA Malibu
- 专利权人： HRL Laboratories, LLC
- 当前专利权人： HRL Laboratories, LLC
- 当前专利权人地址： US CA Malibu
- 代理机构： Ladas & Parry
- 主分类号： H01L29/80
- IPC分类号： H01L29/80 ; H01L29/40 ; H01L23/34
摘要：
A suspended-membrane/suspended-substrate monolithic microwave integrated circuit module and method of making same. The device contains a plurality of active devices, such as transistors, a plurality of transmission mediums connected to the active devices; and a substrate having a first portion supporting the active devices and the transmission mediums thereon, and further having a plurality of discrete second portions extending from the first portion. The method teaches how to manufacture the device.
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