Invention Grant
- Patent Title: Semiconductor device, semiconductor wafer structure and method for manufacturing the semiconductor wafer structure
- Patent Title (中): 半导体器件,半导体晶片结构以及半导体晶片结构的制造方法
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Application No.: US12175039Application Date: 2008-07-17
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Publication No.: US07825446B2Publication Date: 2010-11-02
- Inventor: Yasufumi Takahashi , Kenichiro Kajio
- Applicant: Yasufumi Takahashi , Kenichiro Kajio
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Fujitsu Patent Center
- Main IPC: H01L29/92
- IPC: H01L29/92

Abstract:
There is provided a semiconductor device including, a semiconductor substrate having a circuit forming region and a peripheral region, a base insulating film formed over the semiconductor substrate, a capacitor formed of a lower electrode, a capacitor dielectric film made of a ferroelectric material, and an upper electrode in this order over the base insulating film in the circuit forming region, an uppermost interlayer insulating film formed over the capacitor, a seal ring formed over the semiconductor substrate in the peripheral region, the seal ring having a height that reaches at least the upper surface of the interlayer insulating film, and surrounding the circuit forming region, a block film formed over the seal ring and over the interlayer insulating film in the circumference of the seal ring, and an electrode conductor pattern which is formed over the interlayer insulating film in the peripheral region, the electrode conductor pattern having an electrode pad, and having a cross-section exposed to a dicing surface.
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