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US07825448B2 U-shaped SONOS memory having an elevated source and drain 有权
具有升高的源极和漏极的U形SONOS存储器

U-shaped SONOS memory having an elevated source and drain
Abstract:
A semiconductor device and a method for manufacturing thereof are provided. The semiconductor device includes two epitaxial semiconductor layers formed on a semiconductor substrate, bit lines formed on upper portions of the two epitaxial semiconductor layers, and a charge storage layer formed on the semiconductor substrate between the two epitaxial semiconductor layers.
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