Invention Grant
- Patent Title: Array of capacitors with electrically insulative rings
- Patent Title (中): 具有电绝缘环的电容器阵列
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Application No.: US11787079Application Date: 2007-04-12
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Publication No.: US07825451B2Publication Date: 2010-11-02
- Inventor: H. Montgomery Manning
- Applicant: H. Montgomery Manning
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
The invention includes methods and integrated circuitry. Pillars project outwardly from openings in a first material over individual capacitor storage node locations. Insulative material is deposited over the first material laterally about sidewalls of the projecting pillars, and is anisotropically etched effective to expose underlying first material and leave electrically insulative material received laterally about the sidewalls of the projecting pillars. Openings are formed within a second material to the pillars. The pillars are etched from the substrate through the openings in the second material, and individual capacitor electrodes are formed within the openings in electrical connection with the storage node locations. The individual capacitor electrodes have the anisotropically etched insulative material received laterally about their outer sidewalls. The individual capacitor electrodes are incorporated into a plurality of capacitors. Other implementations and aspects are contemplated.
Public/Granted literature
- US20070196978A1 Integrated circuitry comprising a pair of adjacent capacitors Public/Granted day:2007-08-23
Information query
IPC分类: