Invention Grant
- Patent Title: Semiconductor memory device with reduced power consumption
- Patent Title (中): 具有降低功耗的半导体存储器件
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Application No.: US12166359Application Date: 2008-07-02
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Publication No.: US07825456B2Publication Date: 2010-11-02
- Inventor: Yong-Ho Oh
- Applicant: Yong-Ho Oh
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee: Dongbu HiTek Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2007-0073786 20070724
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A nonvolatile semiconductor memory device and a method for manufacturing the same that may include forming an isolation pattern in a substrate, and then etching a portion of the isolation pattern to expose a portion of an active region of the substrate, and then forming high-density second-type ion implantation regions spaced apart at both edges of the active region by performing a tilted ion implantation process, and then forming a high-density first-type ion implantation region as a bit line in the active region, and then forming an insulating layer on the substrate including the high-density first-type ion implantation region, the high-density second-type ion implantation regions and the isolation pattern, and then forming a metal interconnection as a word line on the insulating layer pattern and extending in a direction perpendicular to bit line.
Public/Granted literature
- US20090026573A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2009-01-29
Information query
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