Invention Grant
- Patent Title: Power semiconductor device and manufacturing method of the same
- Patent Title (中): 功率半导体器件及其制造方法相同
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Application No.: US12132610Application Date: 2008-06-04
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Publication No.: US07825480B2Publication Date: 2010-11-02
- Inventor: Hiroki Arai , Nobuyuki Shirai , Tsuyoshi Kachi
- Applicant: Hiroki Arai , Nobuyuki Shirai , Tsuyoshi Kachi
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-175114 20070703
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
The characteristics of a semiconductor device including a trench-gate power MISFET are improved. The semiconductor device includes a substrate having an active region where the power MISFET is provided and an outer circumferential region which is located circumferentially outside the active region and where a breakdown resistant structure is provided, a pattern formed of a conductive film provided over the substrate in the outer circumferential region with an insulating film interposed therebetween, another pattern isolated from the pattern, and a gate electrode terminal electrically coupled to the gate electrodes of the power MISFET and provided in a layer over the conductive film. The conductive film of the pattern is electrically coupled to the gate electrode terminal, while the conductive film of another pattern is electrically decoupled from the gate electrode terminal.
Public/Granted literature
- US20090008708A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2009-01-08
Information query
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