Invention Grant
- Patent Title: Semiconductor device and method of producing the same
-
Application No.: US12265454Application Date: 2008-11-05
-
Publication No.: US07825489B2Publication Date: 2010-11-02
- Inventor: Kazuo Tomita
- Applicant: Kazuo Tomita
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: McDermott Will & Emery LLP
- Priority: JP11-355645 19991215
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
In a semiconductor device having element isolation made of a trench-type isolating oxide film 13, large and small dummy patterns 11 of two types, being an active region of a dummy, are located in an isolating region 10, the large dummy patterns 11b are arranged at a position apart from actual patterns 9, and the small dummy patterns 11a are regularly arranged in a gap at around a periphery of the actual patterns 9, whereby uniformity of an abrading rate is improved at a time of abrading an isolating oxide film 13a is improved, and surface flatness of the semiconductor device becomes preferable.
Public/Granted literature
- US20090072346A1 SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME Public/Granted day:2009-03-19
Information query
IPC分类: