Invention Grant
- Patent Title: Field-effect transistor and method for fabricating the same
- Patent Title (中): 场效应晶体管及其制造方法
-
Application No.: US11415199Application Date: 2006-05-02
-
Publication No.: US07825493B2Publication Date: 2010-11-02
- Inventor: Keiji Ikeda
- Applicant: Keiji Ikeda
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Fujitsu Patent Center
- Priority: JP2005-262725 20050909; JP2006-032652 20060209
- Main IPC: H01L31/117
- IPC: H01L31/117

Abstract:
A field-effect transistor that increases the operation speeds of complementary field-effect transistors. Each of an nMOSFET and a pMODFET has a Ge channel and source and drain regions formed of an NiGe layer. The height of Schottky barriers formed at a junction between a channel region and the source region of the nMOSFET and at a junction between the channel region and the drain region of the nMOSFET is changed by very thin high-concentration segregation layers formed by making As atoms, Sb atoms, S atoms, or the like segregate at the time of forming the NiGe layer. As a result, Schottky barrier height suitable for the nMOSFET and the pMODFET can be obtained, thus being capable of realizing high-speed CMOSFETs.
Public/Granted literature
- US20070057347A1 Field-effect transistor and method for fabricating the same Public/Granted day:2007-03-15
Information query
IPC分类: