Invention Grant
- Patent Title: Undercut-free BLM process for Pb-free and Pb-reduced C4
- Patent Title (中): 无铅和Pb减少C4的无切割BLM工艺
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Application No.: US12357484Application Date: 2009-01-22
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Publication No.: US07825511B2Publication Date: 2010-11-02
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- Applicant: Timothy H. Daubenspeck , Jeffrey P. Gambino , Christopher D. Muzzy , Wolfgang Sauter
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Richard Kotulak, Esq.
- Main IPC: H01L23/12
- IPC: H01L23/12

Abstract:
A system and method for eliminating undercut when forming a C4 solder bump for BLM (Ball Limiting Metallurgy) and improving the C4 pitch. In the process, a barrier layer metal stack is deposited above a metal pad layer. A top layer of the barrier layer metals (e.g., Cu) is patterned by CMP with a bottom conductive layer of the barrier metal stack removed by etching. The diffusion barrier and C4 solder bump may be formed by electroless plating, in one embodiment, using a maskless technique, or by an electroplating techniques using a patterned mask. This allows the pitch of the C4 solder bumps to be reduced.
Public/Granted literature
- US20090127710A1 UNDERCUT-FREE BLM PROCESS FOR PB-FREE AND PB-REDUCED C4 Public/Granted day:2009-05-21
Information query
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