Invention Grant
- Patent Title: Probe card configuration for low mechanical flexural strength electrical routing substrates
- Patent Title (中): 用于低机械抗弯强度电路基板的探针卡配置
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Application No.: US11479068Application Date: 2006-06-30
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Publication No.: US07825674B2Publication Date: 2010-11-02
- Inventor: Makarand S. Shinde , Richard A. Larder , Timothy E. Cooper , Ravindra V. Shenoy , Benjamin N. Eldridge
- Applicant: Makarand S. Shinde , Richard A. Larder , Timothy E. Cooper , Ravindra V. Shenoy , Benjamin N. Eldridge
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/02
- IPC: G01R31/02 ; H01R11/18

Abstract:
A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface tile provided between the probes and a lower flexural strength space transformer substrate.
Public/Granted literature
- US20060244470A1 Probe card configuration for low mechanical flexural strength electrical routing substrates Public/Granted day:2006-11-02
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