发明授权
- 专利标题: Probe card configuration for low mechanical flexural strength electrical routing substrates
- 专利标题(中): 用于低机械抗弯强度电路基板的探针卡配置
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申请号: US11479068申请日: 2006-06-30
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公开(公告)号: US07825674B2公开(公告)日: 2010-11-02
- 发明人: Makarand S. Shinde , Richard A. Larder , Timothy E. Cooper , Ravindra V. Shenoy , Benjamin N. Eldridge
- 申请人: Makarand S. Shinde , Richard A. Larder , Timothy E. Cooper , Ravindra V. Shenoy , Benjamin N. Eldridge
- 申请人地址: US CA Livermore
- 专利权人: FormFactor, Inc.
- 当前专利权人: FormFactor, Inc.
- 当前专利权人地址: US CA Livermore
- 代理机构: Kirton & McConkie
- 主分类号: G01R31/02
- IPC分类号: G01R31/02 ; H01R11/18
摘要:
A mechanical support configuration for a probe card of a wafer test system is provided to increase support for a very low flexural strength substrate that supports spring probes. Increased mechanical support is provided by: (1) a frame around the periphery of the substrate having an increased sized horizontal extension over the surface of the substrate; (2) leaf springs with a bend enabling the leaf springs to extend vertically and engage the inner frame closer to the spring probes; (3) an insulating flexible membrane, or load support member machined into the inner frame, to engage the low flexural strength substrate farther away from its edge; (4) a support structure, such as support pins, added to provide support to counteract probe loading near the center of the space transformer substrate; and/or (5) a highly rigid interface tile provided between the probes and a lower flexural strength space transformer substrate.
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