Invention Grant
US07825675B2 Method and apparatus for providing active compliance in a probe card assembly
有权
用于在探针卡组件中提供主动柔性的方法和装置
- Patent Title: Method and apparatus for providing active compliance in a probe card assembly
- Patent Title (中): 用于在探针卡组件中提供主动柔性的方法和装置
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Application No.: US11555567Application Date: 2006-11-01
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Publication No.: US07825675B2Publication Date: 2010-11-02
- Inventor: Keith J. Breinlinger
- Applicant: Keith J. Breinlinger
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
A probe card assembly can comprise a first source of compliance and a second source of compliance. The probe card assembly can further comprise a controller, which can be configured to apportion a total compliance demand placed on the probe card assembly between the first source of compliance and the second source of compliance.
Public/Granted literature
- US20080100312A1 Method And Apparatus For Providing Active Compliance In A Probe Card Assembly Public/Granted day:2008-05-01
Information query
