Invention Grant
US07825679B2 Dielectric film and layer testing 有权
电介质膜和层测试

Dielectric film and layer testing
Abstract:
A system for testing and a method for making a semiconductor device is disclosed. A preferred embodiment includes a conductor overlying a dielectric layer. The conductor is coupled to a first test pad via a first conducting line and to a second test pad via a second conducting line.
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