Invention Grant
- Patent Title: Integrated coupled resonator filter and bulk acoustic wave devices
- Patent Title (中): 集成耦合谐振滤波器和体声波器件
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Application No.: US11756583Application Date: 2007-05-31
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Publication No.: US07825749B2Publication Date: 2010-11-02
- Inventor: Robert Thalhammer , Martin Handtmann , Jyrki Kaitila
- Applicant: Robert Thalhammer , Martin Handtmann , Jyrki Kaitila
- Applicant Address: SG Singapore
- Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies Wireless IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H03H9/60
- IPC: H03H9/60 ; H01L41/22

Abstract:
A method for manufacturing a filter device is provided. The filter device comprises a coupled resonator at a first site, a shunt resonator at a second site and a series resonator at a third site, the coupled resonator comprising a first and a second resonator. The method comprising a step of providing a substrate with a piezoelectric layer sandwiched between a first electrode and a first part of a second electrode at the first site and the second site, the piezoelectric layer sandwiched between the first electrode and a second part of the second electrode at the third site. The method further comprising the step of forming a coupling layer on the second electrode, the step of forming a further piezoelectric layer sandwiched between a further first electrode and a further second electrode at the third site and the step of removing the coupling layer at the second and third sites.
Public/Granted literature
- US20080297280A1 Integrated Coupled Resonator Filter and Bulk Acoustic Wave Devices Public/Granted day:2008-12-04
Information query
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