Invention Grant
- Patent Title: Radiation beam pulse trimming
- Patent Title (中): 辐射束脉冲修整
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Application No.: US11847928Application Date: 2007-08-30
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Publication No.: US07826037B2Publication Date: 2010-11-02
- Inventor: Huibert Visser , Oscar Franciscus Jozephus Noordman , Henri Johannes Petrus Vink , Marcus Gerhardus Hendrikus Meijerink , Koenraad Remi André Maria Schreel , Cornelis Cornelia De Bruijn
- Applicant: Huibert Visser , Oscar Franciscus Jozephus Noordman , Henri Johannes Petrus Vink , Marcus Gerhardus Hendrikus Meijerink , Koenraad Remi André Maria Schreel , Cornelis Cornelia De Bruijn
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/42 ; G03B27/54 ; G03B27/32 ; G02F1/00 ; G02F1/01
Abstract:
A system is used to perform fast and slow applications, for example fast application can be pulse trimming. The system includes a radiation source, an electro-optical modulator, and a beam splitter. The radiation source is configured to generate a polarized beam of radiation. The electro-optical modulator, formed of crystalline quartz, is configured to modulate the beam of radiation. The beam splitter is configured to direct a first portion of the beam to a beam dump and to form an output beam from a second portion of the beam.
Public/Granted literature
- US20080111981A1 Radiation Beam Pulse Trimming Public/Granted day:2008-05-15
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