Invention Grant
- Patent Title: Compensation of effects of atmospheric perturbations in optical metrology
- Patent Title (中): 大气扰动对光学计量的影响的补偿
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Application No.: US11876577Application Date: 2007-10-22
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Publication No.: US07826063B2Publication Date: 2010-11-02
- Inventor: Henry A. Hill
- Applicant: Henry A. Hill
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
Public/Granted literature
- US20080062405A1 COMPENSATION OF EFFECTS OF ATMOSPHERIC PERTURBATIONS IN OPTICAL METROLOGY Public/Granted day:2008-03-13
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