Invention Grant
US07826063B2 Compensation of effects of atmospheric perturbations in optical metrology 有权
大气扰动对光学计量的影响的补偿

Compensation of effects of atmospheric perturbations in optical metrology
Abstract:
In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
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