Invention Grant
- Patent Title: MEMS device having a recessed cavity and methods therefor
- Patent Title (中): 具有凹腔的MEMS器件及其方法
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Application No.: US11765981Application Date: 2007-06-20
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Publication No.: US07826127B2Publication Date: 2010-11-02
- Inventor: Nassim Khonsari , Clarence Chui
- Applicant: Nassim Khonsari , Clarence Chui
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02F1/03 ; H01L23/20

Abstract:
A microelectromechanical systems device having a transparent substrate joined to a planar backplate with a raised perimeter structure forming a recessed cavity or cell. The raised perimeter structure is formed by applying a first layer around the peripheral area of the backplate to form a recessed cell. A second layer is applied over the first layer. The first layer is thicker than the second layer. The thicker layer comprises a viscous material. A second layer is a thinner adhesive layer, and is applied over the thicker layer to join the backplate to the transparent substrate to encapsulate the microelectromechanical systems device formed on the transparent substrate.
Public/Granted literature
- US20070297037A1 MEMS DEVICE HAVING A RECESSED CAVITY AND METHODS THEREFOR Public/Granted day:2007-12-27
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