Invention Grant
US07826142B2 Method for improved optical design using deterministically defined surfaces
有权
使用确定性限定的表面改进光学设计的方法
- Patent Title: Method for improved optical design using deterministically defined surfaces
- Patent Title (中): 使用确定性限定的表面改进光学设计的方法
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Application No.: US11117490Application Date: 2005-04-29
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Publication No.: US07826142B2Publication Date: 2010-11-02
- Inventor: Nora-Jean Harned , Richard A. Gontin , Robert D. Harned , Azat M. Latypov , Stanislav Y. Smirnov
- Applicant: Nora-Jean Harned , Richard A. Gontin , Robert D. Harned , Azat M. Latypov , Stanislav Y. Smirnov
- Applicant Address: NL Veldhoven
- Assignee: ASML Holding N.V.
- Current Assignee: ASML Holding N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G02B3/00
- IPC: G02B3/00
Abstract:
An embodiment of the present invention provides a method for designing optical surfaces. According to this method, m optical surfaces are defined, such that each successive optical surface receives a wavefront from a previous optical surface. Wavefront aberrations caused by each optical surface are calculated. The changes at each respective optical surface required to compensate for the wavefront aberration caused by the respective optical surfaces are then calculated. A desired optical profile for each of the m optical surfaces is determined in accordance with the calculated changes to each respective optical surface.
Public/Granted literature
- US20060245094A1 Method for improved optical design using deterministically defined surfaces Public/Granted day:2006-11-02
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