Invention Grant
- Patent Title: High speed piezoelectric optical system with tunable focal length
- Patent Title (中): 具有可调谐焦距的高速压电光学系统
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Application No.: US12115142Application Date: 2008-05-05
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Publication No.: US07826144B2Publication Date: 2010-11-02
- Inventor: Mark J. Mescher
- Applicant: Mark J. Mescher
- Applicant Address: US MA Cambridge
- Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee: The Charles Stark Draper Laboratory, Inc.
- Current Assignee Address: US MA Cambridge
- Agency: Foley & Lardner LLP
- Agent Matthew L. Fenselau; Steven A. Moore
- Main IPC: G02B1/06
- IPC: G02B1/06

Abstract:
A varifocal optical system includes a substantially circular membrane deposited on a substrate, and a ring-shaped PZT thin film deposited on the outer portion of the circular membrane. The membrane may be a MEMS-micromachined membrane, made of thermal oxide, polysilicon, ZrO2 and SiO2. The membrane is initially in a buckled state, and may function as a mirror or a lens. Application of an electric voltage between an inner and outer electrode on the piezoelectric thin film induces a lateral strain on the PZT thin film, thereby altering the curvature of the membrane, and thus its focal length. Focal length tuning speeds as high as 1 MHz have been demonstrated. Tuning ranges of several hundred microns have been attained. The varifocal optical system can be used in many applications that require rapid focal length tuning, such as optical switching, scanning confocal microscopy, and vibration compensation in optical storage disks.
Public/Granted literature
- US20080225379A1 HIGH SPEED PIEZOELECTRIC OPTICAL SYSTEM WITH TUNABLE FOCAL LENGTH Public/Granted day:2008-09-18
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