Invention Grant
- Patent Title: Vibration damping for photolithographic lens mount
- Patent Title (中): 光刻胶片的振动阻尼
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Application No.: US11815048Application Date: 2006-02-07
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Publication No.: US07826155B2Publication Date: 2010-11-02
- Inventor: Bernhard Geuppert , Leonhard Soell
- Applicant: Bernhard Geuppert , Leonhard Soell
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- International Application: PCT/EP2006/001046 WO 20060207
- International Announcement: WO2006/084657 WO 20060817
- Main IPC: G02B7/02
- IPC: G02B7/02

Abstract:
A connection between two components supported in a mutually vibrating fashion has at least one connection element connecting the two components, and a gap located between the two components in which a medium is located. The gap has a width small enough to largely prevent a displacement of the medium inside the gap during comparatively fast relative movements between the two components.
Public/Granted literature
- US20080285161A1 Vibration Damping For Photolithographic Lens Mount Public/Granted day:2008-11-20
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |