Invention Grant
US07826155B2 Vibration damping for photolithographic lens mount 有权
光刻胶片的振动阻尼

Vibration damping for photolithographic lens mount
Abstract:
A connection between two components supported in a mutually vibrating fashion has at least one connection element connecting the two components, and a gap located between the two components in which a medium is located. The gap has a width small enough to largely prevent a displacement of the medium inside the gap during comparatively fast relative movements between the two components.
Public/Granted literature
Information query
Patent Agency Ranking
0/0