Invention Grant
- Patent Title: Optical sensing in a directional MEMS microphone
- Patent Title (中): 定向MEMS麦克风的光学感应
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Application No.: US11335137Application Date: 2006-01-19
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Publication No.: US07826629B2Publication Date: 2010-11-02
- Inventor: Ronald N. Miles , F. Levent Degertekin
- Applicant: Ronald N. Miles , F. Levent Degertekin
- Applicant Address: US NY Binghamton
- Assignee: State University New York
- Current Assignee: State University New York
- Current Assignee Address: US NY Binghamton
- Agency: Ostrolenk Faber LLP
- Agent Steven M. Hoffberg
- Main IPC: H04R25/00
- IPC: H04R25/00 ; G01H1/00 ; G01D5/36 ; G01B11/02

Abstract:
A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm×2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.
Public/Granted literature
- US20070165896A1 Optical sensing in a directional MEMS microphone Public/Granted day:2007-07-19
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