Invention Grant
- Patent Title: Method and system for operating a mass flow controller
- Patent Title (中): 操作质量流量控制器的方法和系统
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Application No.: US12238879Application Date: 2008-09-26
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Publication No.: US07826986B2Publication Date: 2010-11-02
- Inventor: R. Mike McDonald
- Applicant: R. Mike McDonald
- Applicant Address: US CO Fort Collins
- Assignee: Advanced Energy Industries, Inc.
- Current Assignee: Advanced Energy Industries, Inc.
- Current Assignee Address: US CO Fort Collins
- Agency: Neugeboren O'Dowd PC
- Agent Sean R. O'Dowd
- Main IPC: G01F1/00
- IPC: G01F1/00

Abstract:
A system and method for operating a mass flow controller is described. One embodiment validates the operation of a mass flow controller thermal sensor, including detecting zero drift and span drift in the sensor by comparing the thermal sensor output to a pressure sensor output. In one embodiment, each sensor provides a signal to a digital controller or other processing unit and the controller calculates the mass flow rates of a gas flowing through the unit as measured by the sensors. The mass flow rates may then be compared to determine if one of the thermal sensor is operating properly.
Public/Granted literature
- US20100080262A1 METHOD AND SYSTEM FOR OPERATING A MASS FLOW CONTROLLER Public/Granted day:2010-04-01
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