发明授权
US07829267B2 Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium 失效
压模,形成凹/凸图案的方法,以及信息记录介质的制造方法

Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium
摘要:
A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.
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