发明授权
- 专利标题: Stamper, method of forming a concave/convex pattern, and method of manufacturing an information recording medium
- 专利标题(中): 压模,形成凹/凸图案的方法,以及信息记录介质的制造方法
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申请号: US11653918申请日: 2007-01-17
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公开(公告)号: US07829267B2公开(公告)日: 2010-11-09
- 发明人: Minoru Fujita , Mikiharu Hibi
- 申请人: Minoru Fujita , Mikiharu Hibi
- 申请人地址: JP Tokyo
- 专利权人: TDK Corporation
- 当前专利权人: TDK Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2006-009377 20060118
- 主分类号: B29D17/00
- IPC分类号: B29D17/00 ; G03C5/00
摘要:
A stamper is formed so that a thickness between a concave/convex pattern formation surface, where a concave/convex pattern is formed, and a rear surface gradually decreases in a predetermined area of the stamper. The predetermined area corresponds to an area where pressure is likely to be concentrated when the concave/convex pattern of the stamper is used to form a concave/convex pattern on a substrate. A method of forming a concave/convex pattern uses such stamper, and a method of manufacturing an information recording medium uses a concave/convex pattern formed by such method.
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