发明授权
- 专利标题: MOSFET with asymmetrical extension implant
- 专利标题(中): 具有不对称延伸植入物的MOSFET
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申请号: US12121387申请日: 2008-05-15
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公开(公告)号: US07829401B2公开(公告)日: 2010-11-09
- 发明人: Frank Bin Yang , Andrew M. Waite , Scott Luning
- 申请人: Frank Bin Yang , Andrew M. Waite , Scott Luning
- 申请人地址: US TX Austin
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Ingrassia, Fisher & Lorenz, P.C.
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8234
摘要:
A method for fabricating a MOSFET (e.g., a PMOS FET) includes providing a semiconductor substrate having surface characterized by a (110) surface orientation or (110) sidewall surfaces, forming a gate structure on the surface, and forming a source extension and a drain extension in the semiconductor substrate asymmetrically positioned with respect to the gate structure. An ion implantation process is performed at a non-zero tilt angle. At least one spacer and the gate electrode mask a portion of the surface during the ion implantation process such that the source extension and drain extension are asymmetrically positioned with respect to the gate structure by an asymmetry measure.
公开/授权文献
- US20090283806A1 MOSFET WITH ASYMMETRICAL EXTENSION IMPLANT 公开/授权日:2009-11-19
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