发明授权
- 专利标题: Vacuum cell thermal isolation for a phase change memory device
- 专利标题(中): 用于相变存储器件的真空室热隔离
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申请号: US11408598申请日: 2006-04-21
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公开(公告)号: US07829876B2公开(公告)日: 2010-11-09
- 发明人: Hsiang Lan Lung
- 申请人: Hsiang Lan Lung
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Haynes Beffel & Wolfeld LLP
- 代理商 James F. Hann
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A memory device with improved thermal isolation. The memory cell includes a first electrode element, having an upper surface; an insulator stack formed on the first electrode element, including first, second and third insulating members, all generally planar in form and having a central cavity formed therein and extending therethrough, wherein the second insulator member is recessed from the cavity; a phase change element, generally T-shaped in form, having a base portion extending into the cavity to make contact with the first electrode element and making contact with the first and third insulating members, and a crossbar portion extending over and in contact with the third insulating member, wherein the base portion of the phase change element, the recessed portions of the second insulating member and the surfaces of the first and third insulating members define a thermal isolation void; and a second electrode formed in contact with the phase change member.
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