发明授权
US07830531B2 Displacement detecting device and optical instrument having the same
有权
位移检测装置和具有该位移检测装置的光学仪器
- 专利标题： Displacement detecting device and optical instrument having the same
- 专利标题（中）： 位移检测装置和具有该位移检测装置的光学仪器
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申请号： US12390630申请日： 2009-02-23
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公开(公告)号： US07830531B2公开(公告)日： 2010-11-09
- 发明人: Hidenori Nakagawa
- 申请人： Hidenori Nakagawa
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2008-042754 20080225
- 主分类号： G01B11/14
- IPC分类号： G01B11/14
摘要：
A displacement detecting device includes a light source for projecting light to an object to be examined, the light source being movable relative to the object to be examined, a first reflecting element being fixed to the object to be examined and including a reflection portion for reflecting light from the light source and a non-reflection portion, a first light receiving element for receiving light reflected by the first reflecting element, a second reflecting element fixed to the object to be examined and including a reflection portion for reflecting light from the light source and a non-reflection portion, and a second light receiving element for receiving light reflected by the second reflecting element, wherein the second reflecting element is disposed at a light path through which at least a portion of light from the light source and advancing via the first reflecting element is directed to the second light receiving element.
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