发明授权
- 专利标题: Imprinting method and stamper
- 专利标题(中): 压印方法和压模
-
申请号: US12413366申请日: 2009-03-27
-
公开(公告)号: US07833458B2公开(公告)日: 2010-11-16
- 发明人: Akiko Yuzawa , Seiji Morita , Shinobu Sugimura , Masatoshi Sakurai
- 申请人: Akiko Yuzawa , Seiji Morita , Shinobu Sugimura , Masatoshi Sakurai
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Knobbe, Martens, Olson & Bear LLP
- 优先权: JP2008-087763 20080328
- 主分类号: B28B7/10
- IPC分类号: B28B7/10
摘要:
According to one embodiment, an imprinting method includes applying a resist to a substrate, imprinting a stamper on which protruded patterns are formed against the resist applied to the substrate, forcing a distal end of a peeling wedge into a part between the substrate and the stamper, and introducing a gas between the substrate and the stamper to peel off the stamper from the substrate, in which a gap between the substrate and the stamper is made larger than a thickness of the resist at a part into which the distal end of the peeling wedge is forced.
公开/授权文献
- US20090243152A1 IMPRINTING METHOD AND STAMPER 公开/授权日:2009-10-01