发明授权
US07834395B2 3-D channel field-effect transistor, memory cell and integrated circuit
有权
3-D通道场效应晶体管,存储单元和集成电路
- 专利标题: 3-D channel field-effect transistor, memory cell and integrated circuit
- 专利标题(中): 3-D通道场效应晶体管,存储单元和集成电路
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申请号: US11674164申请日: 2007-02-13
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公开(公告)号: US07834395B2公开(公告)日: 2010-11-16
- 发明人: Dietmar Temmler , Alexander Sieck
- 申请人: Dietmar Temmler , Alexander Sieck
- 申请人地址: DE Munich
- 专利权人: Qimonda AG
- 当前专利权人: Qimonda AG
- 当前专利权人地址: DE Munich
- 代理机构: Edell, Shapiro & Finnan, LLC
- 主分类号: H01L27/088
- IPC分类号: H01L27/088
摘要:
A field-effect transistor includes a source region, a drain region and a channel region between the source and the drain region. A gate electrode is also arranged between them, where a lower edge of the gate electrode is formed below a lower edge of at least one of the source and drain regions. A first insulator structure is provided between the gate electrode and the source region. A second insulator structure is provided between the gate electrode and the drain region. The first and the second insulator structures are formed asymmetric and may be adapted to different requirements. The asymmetric approach may provide longer transistor channels, a lower resistance of the gate electrode and smaller footprints for 3D-channel-transistors of, for example, array and support transistors in memory cells or power applications.
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