Invention Grant
- Patent Title: Photosensitive composition
- Patent Title (中): 感光组合物
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Application No.: US11939933Application Date: 2007-11-14
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Publication No.: US07838197B2Publication Date: 2010-11-23
- Inventor: Yoko Shibasaki , Kenji Kato , Masao Arima
- Applicant: Yoko Shibasaki , Kenji Kato , Masao Arima
- Applicant Address: JP Tokyo
- Assignee: Taiyo Ink Mfg. Co., Ltd.
- Current Assignee: Taiyo Ink Mfg. Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-309096 20061115
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
There are provided a photosensitive composition used in one-shot exposure of exposing it via a photomask to light from a UV lamp or in direct writing with light from a UV lamp or laser light to form a patterned latent image to be developed with an alkaline aqueous solution, wherein a difference between maximum absorbance and minimum absorbance, in a wavelength range of 355 to 405 nm, of a dry coating thereof before light exposure is within 0.3 per 25 μm film thickness of the dry coating, and a dry film obtained by applying the photosensitive composition onto a carrier film and then drying it.
Public/Granted literature
- US20080113297A1 PHOTOSENSITIVE COMPOSITION Public/Granted day:2008-05-15
Information query
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