发明授权
US07838364B2 Semiconductor device with bulb-type recessed channel and method for fabricating the same 有权
具有灯泡型凹槽的半导体器件及其制造方法

Semiconductor device with bulb-type recessed channel and method for fabricating the same
摘要:
A method for fabricating a semiconductor device includes providing a substrate having a bulb-type recessed region, forming a gate insulating layer over the bulb-type recessed region and the substrate, and forming a gate conductive layer over the gate insulating layer. The gate conductive layer fills the bulb-type recessed region. The gate conductive layer includes two or more conductive layers and a discontinuous interface between the conductive layers.
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