发明授权
- 专利标题: Semiconductor device with bulb-type recessed channel and method for fabricating the same
- 专利标题(中): 具有灯泡型凹槽的半导体器件及其制造方法
-
申请号: US11862453申请日: 2007-09-27
-
公开(公告)号: US07838364B2公开(公告)日: 2010-11-23
- 发明人: Yong-Soo Kim , Hong-Seon Yang , Se-Aug Jang , Seung-Ho Pyi , Kwon Hong , Heung-Jae Cho , Kwan-Yong Lim , Min-Gyu Sung , Seung-Ryong Lee , Tae-Yoon Kim
- 申请人: Yong-Soo Kim , Hong-Seon Yang , Se-Aug Jang , Seung-Ho Pyi , Kwon Hong , Heung-Jae Cho , Kwan-Yong Lim , Min-Gyu Sung , Seung-Ryong Lee , Tae-Yoon Kim
- 申请人地址: KR Icheon-si
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Icheon-si
- 代理机构: Townsend and Townsend and Crew LLP
- 优先权: KR10-2006-0096359 20060929; KR10-2006-0096523 20060929
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for fabricating a semiconductor device includes providing a substrate having a bulb-type recessed region, forming a gate insulating layer over the bulb-type recessed region and the substrate, and forming a gate conductive layer over the gate insulating layer. The gate conductive layer fills the bulb-type recessed region. The gate conductive layer includes two or more conductive layers and a discontinuous interface between the conductive layers.
公开/授权文献
信息查询
IPC分类: