Invention Grant
- Patent Title: Process for collective manufacturing of small volume high precision membranes and cavities
- Patent Title (中): 小容量高精度膜和腔体的集体制造工艺
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Application No.: US12298894Application Date: 2007-04-26
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Publication No.: US07838393B2Publication Date: 2010-11-23
- Inventor: Joel Collet , Stephane Nicolas , Christian Pisella
- Applicant: Joel Collet , Stephane Nicolas , Christian Pisella
- Applicant Address: FR Crolles
- Assignee: Tronic's Microsystems
- Current Assignee: Tronic's Microsystems
- Current Assignee Address: FR Crolles
- Agency: Nixon Peabody LLP
- Priority: FR0651511 20060428
- International Application: PCT/EP2007/054106 WO 20070426
- International Announcement: WO2007/128705 WO 20071115
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L21/302 ; H01L21/461
Abstract:
The invention relates to a process for collective manufacturing of cavities and/or membranes (24), with a given thickness d, in a wafer said to be a semiconductor on insulator layer, comprising at least one semiconducting surface layer with a thickness d on an insulating layer, this insulating layer itself being supported on a substrate, this process comprising: etching of the semiconducting surface layer with thickness d, the insulating layer forming a stop layer, to form said cavities and/or membranes in the surface layer.
Public/Granted literature
- US20090130822A1 PROCESS FOR COLLECTIVE MANUFACTURING OF SMALL VOLUME HIGH PRECISION MEMBRANES AND CAVITIES Public/Granted day:2009-05-21
Information query
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