发明授权
- 专利标题： Micromirror device with a single address electrode
- 专利标题（中）： 具有单个地址电极的微镜器件
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申请号： US12072448申请日： 2008-02-25
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公开(公告)号： US07839561B2公开(公告)日： 2010-11-23
- 发明人: Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- 申请人： Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- 申请人地址： JP JP
- 专利权人： Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人： Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人地址： JP JP
- 代理商 Bo-In Lin
- 主分类号： G09G3/34
- IPC分类号： G09G3/34 ; G02B26/00
摘要：
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflection axis of each mirror, and a driving circuit for controlling the mirror to deflect in the directions of the first and the second regions.
公开/授权文献
- US20090174926A1 Micromirror device with a single address electrode 公开/授权日：2009-07-09