A measurement apparatus for measuring a distance between a base surface and an upper surface of a stepped structure of a workpiece. The measurement apparatus includes a supporting member having an upper surface for supporting the workpiece, a holding member fixed on the top surface, and a micrometer. The holding member includes a reference platform and a depression formed on the reference platform and facing the upper surface. The micrometer is fixed to the holding member and includes an extendable measuring shaft with a contacting portion extending out of the reference platform. The distance is measured by pushing the workpiece into the depression until the base surface make contact with the reference platform.