发明授权
- 专利标题: Illumination system and polarizer for a microlithographic projection exposure apparatus
- 专利标题(中): 用于微光刻投影曝光装置的照明系统和偏振器
-
申请号: US11703259申请日: 2007-04-30
-
公开(公告)号: US07847920B2公开(公告)日: 2010-12-07
- 发明人: Damian Fiolka , Axel Scholz , Manfred Maul
- 申请人: Damian Fiolka , Axel Scholz , Manfred Maul
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G03B27/72
- IPC分类号: G03B27/72 ; G03B27/42
摘要:
An illumination system for illuminating a reticle that moves along a scanning direction in a microlithographic projection exposure apparatus has an optical axis and an optical component producing an illumination angle distribution of the projection light. In accordance with the illumination angle distribution, a plurality of poles is illuminated in a pupil plane of the illumination system. The poles form an arrangement that is only mirror-symmetrical with respect to an axis that is orthogonal to the optical axis of the illumination, but neither parallel nor perpendicular to the scanning direction.
公开/授权文献
信息查询