发明授权
- 专利标题: Measuring equipment
- 专利标题(中): 测量设备
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申请号: US11666078申请日: 2005-11-01
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公开(公告)号: US07847931B2公开(公告)日: 2010-12-07
- 发明人: Naoki Tsumura , Kazushiro Fukushima
- 申请人: Naoki Tsumura , Kazushiro Fukushima
- 申请人地址: JP Otawara-shi JP Tokyo
- 专利权人: Tochigi Nikon Corporation,Nikon Corporation
- 当前专利权人: Tochigi Nikon Corporation,Nikon Corporation
- 当前专利权人地址: JP Otawara-shi JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2004-325264 20041109
- 国际申请: PCT/JP2005/020124 WO 20051101
- 国际公布: WO2006/051728 WO 20060518
- 主分类号: G01J3/00
- IPC分类号: G01J3/00
摘要:
A measuring equipment utilizing terahertz pulse light, includes: a terahertz light generator that generates terahertz pulse light; a terahertz light detector that detects terahertz pulse light; a first condensing optical system that condenses the terahertz pulse light generated by the terahertz light generator; and a second condensing optical system that condenses the terahertz pulse light diverging after being condensed by the first condensing optical system, onto the terahertz light detector. A sample is arranged in a vicinity of a position of condensing the terahertz pulse light by the first condensing optical system; and at least one of the first and the second condensing optical systems includes at least one optical device having a positive or negative refractive power. The measuring equipment further includes: a position adjusting mechanism that adjusts a position of the at least one optical device on an optical axis when the terahertz light detector detects the terahertz pulse light having transmitted through the sample; and a controlling unit that controls the position adjusting mechanism.
公开/授权文献
- US20080013071A1 Measuring Equipment 公开/授权日:2008-01-17
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