发明授权
- 专利标题： Piezo actuator comprising a multilayer encapsulation, and method for the production thereof
- 专利标题（中）： 包括多层封装的压电致动器及其制造方法
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申请号： US12298096申请日： 2007-04-24
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公开(公告)号： US07851978B2公开(公告)日： 2010-12-14
- 发明人: Heiner Bayer , Hellmut Freudenberg , Axel Ganster , Christoph Hamann , Oliver Hennig , Jens Dahl Jensen , Günter Lugert , Randolf Mock , Carsten Schuh , Jörg Zapf
- 申请人： Heiner Bayer , Hellmut Freudenberg , Axel Ganster , Christoph Hamann , Oliver Hennig , Jens Dahl Jensen , Günter Lugert , Randolf Mock , Carsten Schuh , Jörg Zapf
- 申请人地址： DE Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DE Munich
- 代理机构： King & Spalding L.L.P.
- 优先权： DE102006019489 20060426
- 国际申请： PCT/EP2007/053978 WO 20070424
- 国际公布： WO2007/122227 WO 20071101
- 主分类号： H01L41/083
- IPC分类号： H01L41/083
摘要：
In a method for producing a multilayer encapsulation (1) of a piezo actuator (5) such that the piezo actuator (5) is protected towards the outside without having to use an additional enveloping housing-type structure, in order to produce the multilayer encapsulation (1), an electrically insulating elastic layer (10) is first applied to the surface of the piezo actuator (5), whereupon a metallic layer is applied to the electrically insulating elastic layer (10) so as to planarly cover the same.
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