发明授权
- 专利标题: Memory cell
- 专利标题(中): 存储单元
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申请号: US11958134申请日: 2007-12-17
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公开(公告)号: US07855411B2公开(公告)日: 2010-12-21
- 发明人: Tzu-Hsuan Hsu , Hang-Ting Lue
- 申请人: Tzu-Hsuan Hsu , Hang-Ting Lue
- 申请人地址: TW Hsinchu
- 专利权人: MACRONIX International Co., Ltd.
- 当前专利权人: MACRONIX International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: J.C. Patents
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
The invention provides a memory cell. The memory cell is disposed on a substrate and comprises a plurality of isolation structures defining at least a fin structure in the substrate. Further, the surface of the fin structure is higher than the surface of the isolation structure. The memory cell comprises a doped region, a gate, a charge trapping structure and a source/drain region. The doped region is located in a top of the fin structure and near a surface of the top of the fin structure and the doped region has a first conductive type. The gate is disposed on the substrate and straddled the fin structure. The charge trapping structure is disposed between the gate and the fin structure. The source/drain region with a second conductive type is disposed in the fin structures exposed by the gate and the first conductive type is different from the second conductive type.
公开/授权文献
- US20080290391A1 MEMORY CELL AND METHOD FOR MANUFACTURING THE SAME 公开/授权日:2008-11-27
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