发明授权
US07855858B2 Microactuator with self-assembled monolayer encapsulant 有权
具有自组装单层密封剂的微致动器

Microactuator with self-assembled monolayer encapsulant
摘要:
A microactuator comprises a mounting block, a head suspension, a compliant joint for connecting the mounting block to the head suspension, and a piezoelectric element for deforming the compliant joint in order to rotate the head suspension with respect to the mounting block. An encapsulant covers an exposed surface of the microactuator. The encapsulant comprises a self-assembled monolayer formed of an organosilicone or organosilane, where the self-assembled monolayer has a self-limiting thickness of one layer of a molecule.
公开/授权文献
信息查询
0/0