Invention Grant
- Patent Title: Soft template with alignment mark
- Patent Title (中): 具有对准标记的软模板
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Application No.: US11945400Application Date: 2007-11-27
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Publication No.: US07858010B2Publication Date: 2010-12-28
- Inventor: Eun-hyoung Cho , Sung-hoon Choa , Jin-seung Sohn , Du-hyun Lee , Hae-sung Kim
- Applicant: Eun-hyoung Cho , Sung-hoon Choa , Jin-seung Sohn , Du-hyun Lee , Hae-sung Kim
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2006-0120974 20061201
- Main IPC: G03F1/00
- IPC: G03F1/00

Abstract:
A pattern template includes a flexible substrate, a template mold formed on the flexible substrate to include a pattern, and an alignment mark, the alignment mark has a greater refractive index than that of the template mold. The template is manufactured by providing a master template including a pattern area, coating resin for mold in the pattern area, forming a template mold by installing a flexible plate on the resin for mold and curing the resin for mold by radiating UV rays, separating the template mold and the master template, coating a metal thin film on the template mold, and forming an alignment mark at both sides of the template mold.
Public/Granted literature
- US20080131791A1 SOFT TEMPLATE WITH ALIGNMENT MARK Public/Granted day:2008-06-05
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