Invention Grant
- Patent Title: Manufacturing method of pixel structure
- Patent Title (中): 像素结构的制造方法
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Application No.: US12701054Application Date: 2010-02-05
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Publication No.: US07858413B2Publication Date: 2010-12-28
- Inventor: Chun-Hao Tung
- Applicant: Chun-Hao Tung
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: J.C. Patents
- Priority: TW95113330A 20060414
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing the pixel structure is provided. The method includes forming a gate, a scan line connected to the gate, and at least one auxiliary pattern on a substrate. An insulating layer, a semiconductor layer, an ohmic contact layer, and a photoresist layer are formed in sequence. Afterwards, a single exposure and development is performed on the photoresist layer to form a first portion and a second portion. Next, the ohmic contact layer and the semiconductor layer which are not covered by the photoresist layer are removed to expose a part of the insulating layer. Next, the second portion of the photoresist layer is removed. Subsequently, a part of the thickness of the semiconductor layer not covered by the first portion is removed and the exposed insulating layer is removed, so as to form a channel layer and an insulating layer.
Public/Granted literature
- US20100136720A1 MANUFACTURING METHOD OF PIXEL STRUCTURE Public/Granted day:2010-06-03
Information query
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