发明授权
- 专利标题: Electric potential difference detection method and scanning probe microscope
- 专利标题(中): 电位差检测方法和扫描探针显微镜
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申请号: US11891109申请日: 2007-08-09
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公开(公告)号: US07861577B2公开(公告)日: 2011-01-04
- 发明人: Masatsugu Shigeno , Akira Inoue
- 申请人: Masatsugu Shigeno , Akira Inoue
- 申请人地址: JP
- 专利权人: Seiko Instruments Inc.
- 当前专利权人: Seiko Instruments Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP2006-234565 20060830
- 主分类号: G01Q90/00
- IPC分类号: G01Q90/00
摘要:
An electric potential difference detection method detects an electric potential difference between a surface of a sample and a probe of a cantilever in a scanning probe microscope. An AC voltage having a frequency that is ½ of a resonance frequency of the cantilever is applied between the sample and the cantilever, and a magnitude of an amplitude of vibration of the cantilever is detected. On the basis of the detection, a determination is made as to whether an electric potential difference exists or does not exist between the surface of the sample and the cantilever probe. A determination that an electric potential difference between the surface of the sample and the cantilever probe does not exist is made in a case where the cantilever is resonating and the detected magnitude of the amplitude of vibration of the cantilever is greater than a predetermined magnitude.
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